About: http://webisa.webdatacommons.org/14235984

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the equipment such as a waveguide required in the case of the ECR method is not required, and the apparatus structure becomes simpler.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com