| http://www.w3.org/ns/prov#value | - Further, in addition to an inorganic insulating substance such as silicon oxide or silicon nitride, one or more compounds of organic insulating substances such as acrylic or polyimide and siloxane (a compound containing a siloxane bond represented by ???Si???O???Si??? and having an organic group such as hydrogen or an alkyl group as a substituent) may be used.
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