About: http://webisa.webdatacommons.org/142490795

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Successively, a polycrystalline Si, a high melting point metal, a high melting point metal silicide or a low resisting conductor such as Al and Cu is attached thereto to form a plate electrode 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com