About: http://webisa.webdatacommons.org/142824429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the layer thickness of the substrate is not particularly limited, it is usually about 30 to 400 ??m, preferably about 50 to 300 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com