About: http://webisa.webdatacommons.org/142892019

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A layer of silicon oxide or aluminum oxide or other oxide material may be deposited by a plasma assisted chemical vapor deposition technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com