About: http://webisa.webdatacommons.org/142900237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, an insulating filler material film or layer, such as silicon oxide, silicon nitride, silicon oxynitride, amorphous carbon, which has different etch characteristics from the spacer material may be used instead.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com