About: http://webisa.webdatacommons.org/142968795

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although this specification refers to silicon, the substrate 210 may be composed of other materials including a conductive polymer or another suitable micromachinable substrate material having sufficiently high conductivity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com