About: http://webisa.webdatacommons.org/143088808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the past, this was mainly achieved by the reduction of the wavelength or an increase of the numerical aperture (NA).
http://www.w3.org/ns/prov#wasQuotedFrom	innovations-report.com