About: http://webisa.webdatacommons.org/143144666

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One embodiment of IL thereby utilizes imprint templates 305 (see FIG. 8 c) produced by such techniques as e-beam lithography to produce parts that are virtually identical to these imprint templates 305.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com