About: http://webisa.webdatacommons.org/143220258

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Inside the heater 207, a reaction tube 203 is installed, which is capable of accommodate substrates such as wafers 200.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com