About: http://webisa.webdatacommons.org/143229078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An air gap structure and formation method for substantially reducing the undesired capacitance between adjacent interconnects, metal lines or other features in an integrated circuit device is disclosed.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com