About: http://webisa.webdatacommons.org/143296233

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some processing applications it is necessary to use process gases such as argon, nitrogen and oxygen, to name a few, at a higher processing pressure, such as several mTorr up to atmospheric pressure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com