About: http://webisa.webdatacommons.org/14330613

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This embodiment employs a flexible substrate 34 of an insulating material such as a polyimide or polyester upon which individual sensing elements. 12, 14, and 16 are deposited using standard thin film deposition techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr