About: http://webisa.webdatacommons.org/143345107

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, the process gasses can include combinations of Ar, N2, O2, C2F6, CO2, CO and other process gasses.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es