| http://www.w3.org/ns/prov#value | - where, the Ui are the intensity values of for the scan position (e.g., for the 165th scan position), A is a constant, the ??i are related to the information about the test object spatial location corresponding to each intensity value as determined using the scanning interferometry data and initial scan values for the scan positions (e.g., ??i can be height of the test object location corresponding
|
