About: http://webisa.webdatacommons.org/143807211

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	PVD processes deposit thin films on a substrate by such techniques as sputtering, vacuum deposition, or laser ablation from a solid source or target having the desired composition of the deposited film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com