About: http://webisa.webdatacommons.org/143903843

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	forming a thin film from said composite plasma, said thin film including an element derived from said first material stream.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com