About: http://webisa.webdatacommons.org/144053269

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the barrier layer pattern 114 can be formed of a material such as TiN, TiSiN, TaN, TaSiN, TiAIN, TaAIN or RuO2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr