About: http://webisa.webdatacommons.org/144375649

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Dry etching techniques can be used to micromachine mesas, isolation trenches, backside contact via holes, and other forms of pattern definition on thin films, substrates, or other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au