About: http://webisa.webdatacommons.org/14480981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processing chamber has an inner surface at least a portion of which is covered with an absorbing portion including Ta atoms and C atoms.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org