About: http://webisa.webdatacommons.org/144994979

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposit on an insulating substrate a stack of layers including a conductive layer as source or drain electrode layer, a dielectric spacer layer, an optional gate dielectric material and a gate electrode layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com