About: http://webisa.webdatacommons.org/145087734

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor equipment 102 represents any system including electrical and/or mechanical parts used in the manufacture of semiconductor products.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com