About: http://webisa.webdatacommons.org/14517404

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 wherein the host substrate is selected from a group including silicon, germanium, glass, copper, and gallium arsenide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com