About: http://webisa.webdatacommons.org/145290404

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Device for storing and moving substrate cassettes05/01/2006 Semiconductor devices are made on substrates, such as silicon wafers or glass plates.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com