About: http://webisa.webdatacommons.org/145710569

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After being properly positioned, the wafer was heated to a temperature of 400??? C. and a process gas including TEOS, helium, O2 and SiF4 was introduced into the chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com