About: http://webisa.webdatacommons.org/145757003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A film mainly comprising aluminum is deposited by sputter method by 5000 ??? thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es