About: http://webisa.webdatacommons.org/145838499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, a fifth insulator 182, such as oxide, is formed on regions of uncovered first, second and third conductors 56, 57, 58 during this step (step 190).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com