About: http://webisa.webdatacommons.org/145889035

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the source for the entrapment and adhering material may be a layer of a dielectric material, such as aluminum oxide, which is sputtered off the substrate and which forms a dielectric coating on interior chamber surfaces.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es