About: http://webisa.webdatacommons.org/146051195

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	variable spot size constantly centered systems, fixed spot size scanned systems, or variable spot size scanned systems,along with a wide variety of other types of systems.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com