About: http://webisa.webdatacommons.org/146140367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After washing the surface of the semiconductor layer with an etchant containing fluoric acid, an insulating film mainly containing silicon is formed to serve as a gate insulating film 108.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com