About: http://webisa.webdatacommons.org/14620551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer 14 may then be subjected to yet another processing step, including but not limited to chemical processing, rinsing, and/or drying.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com