About: http://webisa.webdatacommons.org/146535961

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More specifically, an aspect of the present invention is an imaging recipe creation apparatus and method for creating an imaging recipe for SEM-based observation of semiconductor patterns by use of a scanning electron microscope.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com