About: http://webisa.webdatacommons.org/146560667

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To obtain the desired structure, deposition parameters such as source evaporation power, cracker temperature, gas flow rates, substrate temperature and chamber pressure can be modified in response to the measured volume fraction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com