About: http://webisa.webdatacommons.org/146646378

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For the application of very thin layers (less than about 1 micrometer), it is especially important to eliminate contaminants including dust particles from the substrate and deposition chamber surface, and the chamber environment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca