About: http://webisa.webdatacommons.org/14667217

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first embodiment described above covers mainly the case where the surface region of the substrate 1 constitutes the object to be etched.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com