About: http://webisa.webdatacommons.org/146764157

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ortion of said at least one substrate, or another substrate, to a second deposition source, and depositing a second layer over the second substrate portion, said second layer including material from said second deposition source.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com