About: http://webisa.webdatacommons.org/146773180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Now, a layer such as tantalum nitride or titanium nitride 70 is deposited conformally over the SiON layer 64 and within the storage node openings.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com