About: http://webisa.webdatacommons.org/146773527

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that conventional valves, heaters and other accessories are not shown in FIG. 1 for simplicity. [0043] In the process chamber 101, the semiconductor wafer 104 is subjected to dry etching under the above-described conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com