| http://www.w3.org/ns/prov#value | - The recessed features are filled with a metal such as copper (Cu) using an electroplating process or a physical vapor deposition process (PVD), which is subsequently planarized using a process such as chemical mechanical polishing (CMP), electropolishing, or ion milling to expose a dielectric of the workpiece 152, the PMD, and/or the ILD, and the conductive paths 225.
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