| http://www.w3.org/ns/prov#value | - As a result, even if there is an exact balance between positive and negative charges incident upon the surface of a resist layer, if there is a difference between distributions of incident directions, the amount of electric charges incident upon a conductive layer to be processed and disposed under the resist layer, changes. [0044]FIGS. 2A and 2B are a cross sectional view and a plan view showing
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