About: http://webisa.webdatacommons.org/146961434

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The X-ray mask blank according to claim 1, wherein said X-ray absorber film comprises a material mainly consisting of Ta.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com