About: http://webisa.webdatacommons.org/147097295

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first conductive interconnection is also covered with a layer comprising oxide, e.g. silicon oxide, by the oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com