| http://www.w3.org/ns/prov#value | - FIG. 3 shows the ionic state when an ion exchanger 62 a mounted on a processing electrode 64 and an ion exchanger 62 b mounted on a feeding electrode 66 are brought into contact with or close to a surface of a workpiece 60, while a voltage is applied via a power source 67 between the processing electrode 64 and the feeding electrode 66, and a liquid 68, e.g. ultrapure water, is supplied from a liq
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