About: http://webisa.webdatacommons.org/147263945

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, in this invention, the first oxidation time for the smallest openings, e.g. about 0.4 microns, is 200 minutes.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com