About: http://webisa.webdatacommons.org/147400680

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This is done even though it is known that a certain amount of shrinkage occurs during processes such as etch and implant.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com