About: http://webisa.webdatacommons.org/147521869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The epitaxial layer sequence preferably has a thickness of at most 20 ??m, and particularly preferably of at most 10 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com