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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first, second and third substrates may be selected from Si, InGaAs, InP, GaAs, Ge, SiC and other semiconductors. [0027] The first and second substrates may comprise respective first and second semicon
http://www.w3.org/ns/prov#wasQuotedFrom	google.com