About: http://webisa.webdatacommons.org/147650212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A heater for a CVD apparatus as claimed in claim 1, wherein said heating element is a ceramic heater, said ceramic heater being fixed on at least three ceramic supports provided on a wall of said reactor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com