About: http://webisa.webdatacommons.org/147860447

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate electrode layer 103 and the gate electrode layer 104 may be formed with an element selected from Ta, W, Ti, Mo, Al, and Cu, an alloy material or a compound material mainly containing the element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com