About: http://webisa.webdatacommons.org/147873516

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film is formed from, for example, aluminium, chromium, tungsten, or other metals, or is a dielectric multilayer film, and is then patterned by photolithography and etching processes to yield the mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com